吉時利參數測試系統

S530 參數測試系統 是針對生產和實驗室環境而設計的,因為這些環境必須處理廣泛的裝置和技術,進而提供領先業界的測試方案彈性、自動化、探測站整合,以及測試資料管理功能。在提供各種標準和自訂參數測試儀給全世界客戶,以設計這些測試解決方案方面,Keithley 擁有超過 30 年的專業技術。

S535 多場地晶片驗收測試系統 是高功率、高解析度晶片位準解決方案,適合在整個實驗室工作流程中,用於測試應用解決方案中的類比、功率、混合訊號和離散裝置。不同於傳統的非同步並列測試配置,一次只在一個場地測試多個裝置,S535 的多並列測試方法可同時在多個場地測試多個裝置。如此可讓探棒索引時間縮短至少 2 倍,因而提升實驗室生產力和降低測試成本。

540 參數測試系統 是全自動、48 接腳參數測試系統,適用於高達 3 kV 功率半導體裝置和結構的晶片位準測試。完全整合式 S540 只需用探棒接觸一次,就能執行所有高壓、低壓和電容測試,最適合最新的複合功率半導體材料,包括碳化矽 (SiC) 和氮化鎵 (GaN)。

S500 整合式測試系統 是可高度配置的儀器式系統,適用於裝置、晶片或卡式位準的半導體特性分析化。建置在我們可行的儀器上,S500 整合式測試系統提供創新的測試功能和系統彈性,可調整以符合您的需求。獨特的量測功能,結合了強大且彈性的自動化特性分析套件 (ACS) 軟體,可提供市場上其他同級系統未提供的各式各樣應用和功能。 

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Keithley Parametric Test Systems

S530 功能

  • 迅速適應新裝置和測試需求
  • 快速、彈性、互動式測試方案開發
  • 與著名的全自動探測站相容
  • 用於 1kV、C-V、脈波產生、頻率量測和低電壓量測的選項
  • 與吉時利的機型 9139A 探棒卡轉接器相容
  • 支援重複使用現有的五吋探棒卡資料庫
  • 可行的檢測技術確保實驗室和晶圓廠的高量測精確度和重複性

S535 功能

  • 在多場地並列或串列操作中,自動執行所有晶片位準直流參數測試。探棒只需要接觸一次,即可測試兩個或四個場地。
  • 多達 64 個測試接腳:四個場地並列測試,每個場地 16 個接腳;兩個場地並列測試,每個場地 32 個接腳;單一場地,串列操作,64 個接腳
  • 最高 100 W 操作:100 V @ 1 A;200 V @ 100 mA
  • 在高速、多接腳、全自動測試環境中達到 1 fA,10 nV 解析度
  • Linux 架構的 Keithley 測試環境 (KTE) 系統軟體相容於舊型 Keithley 測試環境、可輕鬆開發測試和快速執行。
  • Keithley S530 式探棒卡基礎架構也支援舊型 S400 應用解決方案

S540 功能

  • 探棒接觸一次,不必變更纜線或探棒卡基礎架構,針對最多 48 個接腳執行所有晶片位準參數測試,包括崩潰高壓、電容和低壓量測
  • 執行高達 3kV 的電晶體電容量測,例如 Ciss、Coss 和 Crss,不必手動重新配置測試接腳
  • 在高速、多接腳、全自動測試環境中,達到低位準量測效能
  • Linux 架構的吉時利測試環境 (KTE) 系統軟體,可讓您輕鬆開發測試和快速執行
  • 適合流程整合、流程監控和成品晶粒分類中的全自動或半自動應用
  • 將測試時間、測試設定時間和地板空間減到最少,同時達到實驗室等級量測效能,降低擁有成本

S500 功能

  • 全系列電源量測設備 (SMU) 儀器規格,包括次飛安培量測,確保可在幾乎任何裝置上進行廣泛量測。
  • 適用於記憶體特性分析化、電荷泵、單一脈波 PIV (電荷擷取分析) 和 PIV 掃描 (避免自熱) 的脈波產生和超快速 I-V。
  • 低或高通道計數系統,包括平行測試,搭配吉時利的系統啟用和可調整 SMU 儀器。
  • 高電壓、電流和電源量測儀器, 適用於測試如功率 MOSFET 和顯示驅動程式這類的裝置。
  • 切換、探棒卡和佈線可讓系統完全適用於您的 DUT。
Model 9139B-PCA Probe Card Adapter Instruction

零件編號: 9139B-901-01
Manual 19 Feb 2020
Model 9139B-PCA Probe Card Adapter Instruction Manual
Model 9139B-PCA Probe Card Adapter Instruction Manual

零件編號: 9139B-901-01B
Manual 19 Feb 2020
Greater Reliability Testing Confidence from Lab to Fab - Wafer Level Reliability Test Solutions
Keithley Instruments has long been an industry leader in both overall parametric test technology and wafer level reliability (WLR) testing. Several generations of Keithley’s parametric test solutions have offered WLR test algorithm libraries as optio
海報 19 Feb 2020
Measuring MOSFET Gate Charge Using the S530 and S540 Parametric Test Systems
This application note describes how to make gate charge measurements on a MOSFET based on the JEDEC Gate Charge Test Method.

文件編號: 1KW-61389-0
應用摘要 19 Feb 2020
ACS Basic Software Reference Manual

零件編號: ACSBASIC-901-01
Manual 05 Feb 2020
ACS Basic Software Quick Start Guide

零件編號: ACSBASIC-903-01
Manual 05 Feb 2020
ACS Software Quick Start Guide

零件編號: ACS-903-01
Manual 05 Feb 2020
S540 Power Semiconductor Test System Datasheet
The Keithley S540 is a fully-automated, wafer-level parametric test system that can perform all high voltage, low voltage, low current, and capacitance tests up to 3kV in a single probe touch-down to maximize productivity and minimize cost of ownersh

文件編號: 1KW-60909-1
Datasheet 04 Feb 2020
S530/S530-HV Parametric Test Systems

文件編號: 1KW-60240-1
Datasheet 04 Feb 2020
S535 Multi-Site Wafer Acceptance Test System

文件編號: 1KW-61422-0
Datasheet 04 Feb 2020
S500 Data Sheet
Datasheet 04 Feb 2020
9139B Probe Card Adapter
The 9139B-PCA Probe Card Adapter is an option for Keithley’s S530 and S535 Parametric Test Systems and S500 Integrated Test Systems.  It also provides probe-card compatibility with Keithley’s previous generation S400 Parametric Test System.

文件編號: 1KW-61585-0
Datasheet 04 Feb 2020
9139B Probe Card Adapter Gerber Files
規格 04 Feb 2020
9140A Probe Card Adapter Gerber Files
規格 04 Feb 2020
Multi-Site Parallel Testing with the S535 Wafer Acceptance Test System
In semiconductor wafer production, minimizing the cost of test has been identified as the number one challenge.  The biggest factor in the cost of test, as well as in the cost of test system ownership, is throughput of the tester/prober combination.

文件編號: 1KW-61423-0
應用摘要 04 Feb 2020
Achieving Maximum Throughput with Keithley S530 Parametric Test Systems
Keithley Instruments is a world leader in the development of precision DC electrical instruments and integrated parametric test systems. Its expertise in parametric test technology goes back to the early days of the semiconductor industry and continu
應用摘要 04 Feb 2020
Making Ring Oscillator Measurements with the Model S530 Parametric Test System's Frequency Measurement Option
應用摘要 04 Feb 2020
S530 Parametric Test System Specifications
S530 Parametric Test System Specifications

文件編號: SPEC-S530D
規格 04 Feb 2020
S530 Parametric Test Systems with KTE - Quick and Seamless Integration with Existing S400 and S600 Systems
小冊子 04 Feb 2020
S535 Wafer Acceptance Test System Specifications
Specifications document for S535 Wafer Acceptance Test System

文件編號: SPEC-S535A
規格 04 Feb 2020
S530 Semiconductor Parametric Test System: Cost effective, high throughput solutions
規格摘要表 04 Feb 2020
S540 Power Semiconductor Test System Specifications
Specifications document for S540 Power Semiconductor Test System

文件編號: SPEC-S540A
規格 04 Feb 2020
Performing van der Pauw Sheet Resistance Measurements Using the Keithley S530 Parametric Tester
應用摘要 04 Feb 2020
Programming and Erasing Flash Memory Devices Using the Keithley S530 Pulse Generator Option
應用摘要 04 Feb 2020
Understanding Control Systems and Communications for Today's Automobiles
規格摘要表 04 Feb 2020
Gearing Up for Parametric Test's High Voltage Future
白皮書 04 Feb 2020
Touch, Test, Invent with the Next Generation Current and Voltage Source-Measure Instruments
規格摘要表 04 Feb 2020
High Voltage Wafer Testing in a Production Environment with the HV S540 Parametric Test System

文件編號: 1KW-60936-2
應用摘要 04 Feb 2020
Test Methods for Automobile Communication and Control Systems
規格摘要表 04 Feb 2020
S530 KTE Pulse Generator Manual
S530 KTE Pulse Generator Manual
Manual 25 Dec 2019
S540 Parametric Test System Reference
S540 Parametric Test System Reference Manual

零件編號: S540-901-01B
Manual 26 Nov 2019
S540 Parametric Test System Administrative Guide
S540 Parametric Test System Administrative Guide

零件編號: S540-924-01D
Manual 26 Nov 2019
S530 Parametric Test System Administrative Guide
S530 Parametric Test System Administrative Guide

零件編號: S530-924-01F
Manual 26 Nov 2019
S530 KTE Prober Manual

零件編號: S530-911-01B
Manual 26 Nov 2019
S535 Wafer Acceptance Test System Reference
S535 Wafer Acceptance Test System Reference Manual

零件編號: S535-901-01B
Manual 26 Nov 2019
S535 Wafer Acceptance Test System Administrative Guide
S535 Wafer Acceptance Test System Administrative Guide

零件編號: S535-924-01B
Manual 26 Nov 2019
S530-S535-S540 KTE 5.8.2 Release Notes

零件編號: PA-1036V
Manual 26 Nov 2019
S530 Parametric Test System Reference
S530 Parametric Test System Reference Manual

零件編號: S530-901-01B
Manual 26 Nov 2019
Keithley Test Environment (KTE) Programmer's
Keithley Test Environment (KTE) Programmer's Manual

零件編號: S500-904-01B
Manual 26 Nov 2019
KIGEM Automation Software Reference Manual
KIGEM is implemented using a ConX300 driver that complies with the following SEMI standards: E5, E30, E37, E37.1, E39, E39.1, E40, E40.1, E87, E87.1, E90, E90.1, E94, E94.1, E116, and E116.1.

零件編號: KIGEM-901-01B
Manual 26 Nov 2019
KIGEM Automation Software User's Manual
Keithley Instruments 300mm SECS/GEM Automation Interface (KIGEM) on the S530 Parametric Test system provides an interface that complies with both the traditional SECS/GEM standards and the newer set of 300mm SEMI standards. It allows S530 systems to

零件編號: KIGEM-900-01C
Manual 26 Nov 2019
KIGEM Automation Software Release Notes
The release notes for KIGEM 5.7.2b.

零件編號: KIGEM-910-01B
Manual 26 Nov 2019