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Keithley S600DC/RF APT System Integrates DC and RF Measurements for Higher Wafer Test Throughput


Cleveland, Ohio -- January 11, 2002 -- Keithley Instruments, Inc. (NYSE: KEI) today announced availability of the industry's fastest Automated Parametric Test (APT) System for integrated DC and RF wafer measurements. The Model S600DC/RF APT System is a single-insertion DC/RF parametric test solution for probing communications and high speed digital devices at the wafer level. When used with a suitable test structure layout, the system can execute independent DC and RF tests in parallel on separate probes, greatly reducing the time and cost of testing on today's advanced devices. This unique system incorporates the leading vector network analyzer (VNA) and DC/RF probe card technology, supports "lights out" factory automation, and is compatible with both 200mm and 300mm probers. It allows single DUT testing up to 10GHz at rates up to ten times faster than typical rack-and-stack systems using separate DC and RF test operations. Moreover, RF connections embedded on the tes t head and per-pin electronics eliminate manual setup and supply unequaled precision and repeatability. The probe card loads in the same way that it does for DC operation and the system's RF capabilities can be accessed through a transparent interface, allowing greater ease of use.