吉時利 4200A-SCS 參數分析儀

吉時利 4200A-SCS 參數分析儀

使用 4200A-SCS 加速半導體裝置、材料和製程開發的研究、可靠性和故障分析研究。最高效能參數分析儀,其可提供同步電流-電壓 (I-V)、電容-電壓 (C-V),以及超快速脈衝 I-V 量測。

直流電流-電壓
(I-V) 範圍

10 aA - 1A
0.2 µV - 210 V

電容-電壓
(C-V) 範圍

1 kHz - 10 MHz
± 30V 直流偏壓器

脈衝 I-V
範圍

±40 V (80 V p-p),±800 mA
200 MSa/s,5 ns 取樣率

 

吉時利 4200A-SCS 參數分析儀

透過參數提供深入的洞察資訊,快速且清楚。

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聯繫您的大膽探索從未如此輕鬆。4200A-SCS 參數分析儀可將特性複雜度和測試設定減少高達 50%,因而提供清楚、不妥協的量測和分析功能。此外,業界首見的嵌入式量測專門知識可提供測試指引,並讓您對結果有無比信心。

特性

  • 內建英文、中文、日文和韓文的量測視訊
  • 使用數百個使用者可修改的應用測試立即開始您的測試
  • 自動化的即時參數擷取、資料蒐集、算術函數

量測。切換。重複。

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4200A-CVIV 多切換模組可自動切換 I-V 和 C-V 量測,不需重新架設纜線或提起適當的探棒頭。不同於競爭產品,四通道 4200A-CVIV 顯示器提供本機視覺化見解,可在發生非預期結果時進行快速測試設定和輕鬆的疑難排解。

特性

  • 將 C-V 量測移至任何裝置終端,不需重新架設纜線
  • 使用者可針對低電流功能進行配置
  • 個人化輸出通道的名稱
  • 檢視即時測試狀態

特性分析。自訂。最大化。

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簡言而之,4200A-SCS 是可完整自訂也可完全升級,因此您可以對半導體裝置、新材料、主動/被動元件、晶片位準可靠性、故障分析、電化學或幾乎任何類型的取樣執行特性分析和評估。

特性

  • NBTI/PBTI 測試
  • 隨機電報雜訊
  • 固定式記憶體裝置
  • 電壓穩定器應用測試

具備分析探棒和低溫控制器的整合解決方案。

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4200A-SCS 參數分析儀支援許多手動和半自動晶片探棒和低溫控制器,包括 Cascade MicroTech、Lucas Labs/Signatone、MicroManipulator、Wentworth Laboratories、MicroManipulator、LakeShore Model 336 低溫控制器。

特性

  • 「點按」測試順序
  • 「手動」探棒模式測試探棒功能
  • 假探棒模式可啟用除錯,而不會移除指令

 

Model 電流-電壓 (I-V) 範圍 電容-電壓 (C-V) 範圍 脈衝 I-V 範圍 List Price
4200A-SCS 10 aA - 1A
0.2 µV – 210 V
1 kHz – 10 MHz ±40 V (80 V p-p),±800 mA
200 MSa/秒,5 ns 取樣率
配置與報價
Model4200A-SCS
電流-電壓 (I-V) 範圍電容-電壓 (C-V) 範圍脈衝 I-V 範圍
10 aA - 1A<br/> 0.2 µV – 210 V1 kHz – 10 MHz±40 V (80 V p-p),±800 mA<br/> 200 MSa/秒,5 ns 取樣率

Semiconductor Reliability

Perform complex reliability tests while letting the 4200A-SCS take care of the complex coding. Included projects like Hot Carrier Injection Degradation (HCI) give you a jump start on device analysis.

Highlights

  • Combine DC I-V, C-V, and pulse measurements in one set of tests
  • Included support for many probe stations and external instruments
  • Easy to use cycling system allows repeat measurements without coding

C-V Measurement for High Impedance Applications

Use Keithley’s custom Very Low Frequency C-V Technique to analyze the capacitance of your high resistance sample. This technique is performed using only source measure unit (SMU) instruments but can be combined with a 4210-CVU to perform higher frequency measurements as well.

Highlights

  • .01 to 10 Hz frequency range with sensitivity of 1 pF to 10 nF
  • 3½-digit typical resolution, minimum typical of 10 fF

Non-volatile Memory

Put your new technologies to the test with thorough pulsed I-V characterization. The 4200A-SCS comes with support and ready-to-run tests for the latest in NVRAM technologies from floating gate flash to ReRAM and FeRAM. Dual sourcing and measuring capabilities in current and voltage allow both transient and I-V domain characterization.

VCSEL Testing

Multiple, concurrent source measure unit (SMU) instruments in the 4200A-SCS simplify your laser diode testing. Generate LIV (Light intensity-Current-Voltage) curves with connections to only a single box. Advanced probe station and switch support means you can use the same instrument for on-wafer production testing of individual diodes or entire arrays. SMUs can be configured for up to 21 W capabilities for a variety of continuous wave (CW) VCSEL applications.

Nanoscale Device Characterization

The integrated instrument capabilities of the 4200A-SCS simplify the measurement requirements in developing nanoscale electronics such as carbon nanotubes. Start your investigations from a preconfigured test project and expand your work from there. A pulsed source mode for SMUs helps reduce overheating problems can be combined with low voltage C-V and ultra-fast pulsed DC measurements in seconds.

Resistivity of Materials

Use a 4200A-SCS with integrated SMUs to easily measure resistivity using a four-point collinear probe or van der Pauw method. Included tests perform repetitive van der Pauw calculations automatically, saving you valuable research time. A maximum current resolution of 10aA and input impedance of >10­­­­16 ohms give you more accurate and precise results.

MOSFET Characterization

The 4200A-SCS can hold all the instruments necessary for full characterization of MOS devices through component or on-wafer testing. Included tests and projects solve for oxide thickness of a MOSCap, threshold voltages, doping concentration, mobile ion concentration, and more. All these tests can be run at the touch of a button from a single instrument box.

產品規格表 機型 說明 定價
檢視產品規格表 4200A-SCS-PK1
高解析度 IV
210V/100mA,0.1 fA 解析度
若為兩個和三個終端裝置 (MOSFET),CMOS 特性套件 4200A-SCS-PK1 包括:
  • 4200A-SCS 參數分析儀
  • (2) 4200-SMU 模組
  • (1) 4200-PA 前置放大器
  • (1) 8101-PIV 測試治具 (具備取樣裝置)
索取報價
檢視產品規格表 4200A-SCS-PK2
高解析度 IV 與 CV
210V/100mA,0.1 fA 解析度,1kHz - 10MHz
若為高 κ 電介質、深度次微米,CMOS 特性套件 4200A-SCS-PK2 包括:
  • 4200A-SCS 參數分析儀
  • (2) 4200-SMU 模組
  • (1) 4200-PA 前置放大器
  • (1) 4210-CVU 電容-電壓模組
  • (1) 8101-PIV 測試治具 (具備取樣裝置)
索取報價
檢視產品規格表 4200A-SCS-PK3
高解析度及電源 IV 與 CV
210V/1A,0.1 fA 解析度,1kHz - 10MHz
若為電源裝置,高 κ 電介質、深度次微米,CMOS 裝置特性套件 4200A-SCS-PK3 包括:
  • 4200A-SCS 參數分析儀
  • (2) 4200-SMU 模組
  • (2) 4210-SMU
  • (1) 4200-PA 前置放大器
  • (1) 4210-CVU 電容-電壓模組
  • (1) 8101-PIV 測試治具 (具備取樣裝置)
索取報價
檢視產品規格表 4200-BTI-A
超快速 NBTI/PBTI
若為有關尖端矽晶片的先進 NBTI 和 PBTI 量測,CMOS 技術套件 4200-BTI-A 包括:
  • (1) 4225-PMU 超快速 I-V 模組
  • (2) 4225-RPM 遠端前置放大器/切換模組
  • 自動化特性套件 (ACS) 軟體
  • 超快速 BTI 測試專案模組
  • 架設纜線
索取報價

 

Data SheetModuleDescription
4200-BTI-A ULTRA FAST BTI PKG FOR MODEL 4200-SCS
4200-PA REMOTE PREAMP OPT 4200-SMU AND 4210-SMU
4200-SMU MEDIUM POWER SOURCE-MEASURE UNIT
4200A-CVIV 多重切換
4210-CVU 4210 CAPACITANCE VOLTAGE UNIT 1KHZ-10MHZ
4210-SMU HIGH POWER SOURCE-MEASURE UNIT
4220-PGU 雙通道脈波產生器
4225-PMU ULTRA-FAST I-V MODULE FOR THE 4200-SCS
4225-RPM REMOTE AMPLIFIER/SWITCH FOR THE MODEL 4225-PMU
TitleTypeDate
Model 4200A-RM Rack Mount Kit Installation Instructions

This document contains installation instructions for the Model 4200A-RM Rack-Mount Kit, a fixed rack-mount kit for cabinet mounting of the Keithley 4200A-SCS Semiconductor Characterization System.

Model 4200A-RM Rack Mount Kit Installation Instructions


Part number: 071348701
25 Sep 2017
Model 4200A Parameter Analyzer User's Manual
This User's Manual includes specific applications to help you get started quickly.
Part number: 4200A-900-01B
Primary User 28 Aug 2017
Model 4200A-SCS-PK2 Parameter Analyzer Quick Start Guide
The Quick Start Guide for the Keithley Instruments 4200A-SCS-PK2 provides unpacking and basic connection information. It also provides sample tests that you can use to familiarize yourself with the Parameter Analyzer.
Part number: 4200A-PK2-903-01A
Primary User 28 Aug 2017
Model 4200A-SCS Package 3 System Quick Start Guide
The Quick Start Guide for the Keithley Instruments 4200A-SCS-PK3 provides unpacking and basic connection information. It also provides step-by-step examples to allow you to familiarize yourself with the Parameter Analyzer.
Part number: 4200A-PK3-903-01A
Primary User 28 Aug 2017
Model 4200A-SCS Semiconductor Characterization System Quick Start Guide
Brief introduction to the Keithley Instruments 4200A-SCS Parameter Analyzer, including unpacking and initial connection information.
Part number: 4200A-903-01A
Primary User 28 Aug 2017
Model 4200-Compiler Installation Instructions
Installation instructions for the Model 4200-Compiler, a compiler that you can use to create user modules for the 4200A-SCS Parameter Analyzer and the 4200-SCS.
Part number: PA-1030E
Combined User/Service 28 Aug 2017
Modèle 4200A-SCS Liste d'Avertissements
List of documentation warnings for the Canadian market that are in both English and French.
Part number: 077126000
User 28 Aug 2017
Model 4200-SCS Semiconductor Characterization System Declassification and Security Instructions
If you have data security concerns, this document tells you how to clear or sanitize the Keithley Instruments Model 4200-SCS Semiconductor Characterization System's memory devices. It also explains how to declassify an instrument that is not functioning.
Part number: 077134300
Declassification 28 Aug 2017
Model 4200A-SCS Declassification and Security Instructions
If you have data security concerns, this document tells you how to clear or sanitize the Keithley Instruments Model 4200A-SCS Parameter Analyzer's memory devices. It also explains how to declassify an instrument that is not functioning.
Part number: 077126200
Declassification 28 Aug 2017
4200A-SCS Parameter Analyzer Release Notes
The 4200A-SCS Clarius+ software application suite is the initial release of the software for the 4200A-SCS. Clarius+ software requires Microsoft Windows 7 on your 4200A-SCS Parameter Analyzer
Part number: 077132601
Release Notes 28 Aug 2017
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